Method of manufacturing a fixed abrasive material

3 3Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the fro...

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Bibliographic Details
Main Authors Balijepalli, Sudhakar, Aldrich, Dale J, Grier, Laura A, Erdem, Bedri, Meyers, Gregory F
Format Patent
LanguageEnglish
Published 27.06.2006
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Summary:3 3Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/mto 1200 kg/m.