Pad backer and CMP process using the same

A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a rece...

Full description

Saved in:
Bibliographic Details
Main Authors Chang, Li-Min, Liao, Tong, Pao, Chen-Wen, Huang, Justin
Format Patent
LanguageEnglish
Published 23.05.2006
Online AccessGet full text

Cover

More Information
Summary:A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.