Thin film capacitor, thin film capacitor array and electronic component
A thin film capacitor with small electrode resistance and great Q-value which comprises a small number of thin films that are deposited successively is disclosed. It is effective for miniaturization and high density packaging of a device and for preventing poor characteristics and degradation of rel...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
07.03.2006
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| Online Access | Get full text |
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| Summary: | A thin film capacitor with small electrode resistance and great Q-value which comprises a small number of thin films that are deposited successively is disclosed. It is effective for miniaturization and high density packaging of a device and for preventing poor characteristics and degradation of reliability. A plurality of lower electrodes are provided on a supporting substrate , which are spaced apart from each other in a high frequency signal propagation direction P. Two upper electrodes spaced apart from each other in the high frequency signal propagation direction P are provided on one of the plurality of the lower electrodes through a thin film dielectric layer , by which two capacitance elements are formed. The upper electrodes are connected together by an extraction electrode so that the two capacitance elements are connected in series. A maximum distance L between the two upper electrodes in the high frequency signal propagation direction P is smaller than a minimum length W of the upper electrodes in the direction perpendicular to the high frequency signal propagation direction P in plan view. |
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