Alignment method and parameter selection method
A method of aligning an object. The method includes the steps of detecting an image of a mark on the object, obtaining a position of the mark based on the detected image, extracting a feature of the mark based on the detected image, and correcting the detected position based on the extracted feature...
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| Format | Patent |
| Language | English |
| Published |
06.12.2005
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| Online Access | Get full text |
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| Summary: | A method of aligning an object. The method includes the steps of detecting an image of a mark on the object, obtaining a position of the mark based on the detected image, extracting a feature of the mark based on the detected image, and correcting the detected position based on the extracted feature. |
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