Probe driving method, and probe apparatus

• Main Authors: Tomimatsu, Satoshi, Koike, Hidemi, Azuma, Junzo, Ishitani, Tohru, Sugimoto, Aritoshi, Hamamura, Yuichi, Sekihara, Isamu, Shimase, Akira
• Format: Patent
• Language: English
• Published: 01.11.2005

A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow appearing immediately b...