Probe driving method, and probe apparatus

A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow appearing immediately b...

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Bibliographic Details
Main Authors Tomimatsu, Satoshi, Koike, Hidemi, Azuma, Junzo, Ishitani, Tohru, Sugimoto, Aritoshi, Hamamura, Yuichi, Sekihara, Isamu, Shimase, Akira
Format Patent
LanguageEnglish
Published 01.11.2005
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Summary:A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow appearing immediately before the probe contacts the sample, or based on a change in relative positions of a probe image and a sample image that are formed as an ion beam is irradiated diagonally.