Electron microscopy system

A particle-optical apparatus is disclosed which combines the functions of an energy selector and a beam splitter The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam and a secondary electro...

Full description

Saved in:
Bibliographic Details
Main Authors Kienzle, Oliver, Knippelmeyer, Rainer, Müller, Heiko
Format Patent
LanguageEnglish
Published 20.09.2005
Online AccessGet full text

Cover

More Information
Summary:A particle-optical apparatus is disclosed which combines the functions of an energy selector and a beam splitter The particle-optical apparatus is used in an electron microscopy system and serves to separate and superimpose, respectively, beam paths of a primary electron beam and a secondary electron beam