Sensor design and process

An accelerometer for measuring seismic data. The accelerometer includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer also includes a top cap press frame recess and a bottom cap press frame recess for iso...

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Bibliographic Details
Main Authors Selvakumar, Arjun, Goldberg, Howard D, Yu, Duli, Ip, Matthew, Schmidt, Martin A, Marsh, James L, Fung, Bing-Fai, Simon, Philip
Format Patent
LanguageEnglish
Published 20.09.2005
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Summary:An accelerometer for measuring seismic data. The accelerometer includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer also includes a top cap press frame recess and a bottom cap press frame recess for isolating bonding pressures to specified regions of the accelerometer. The accelerometer is vacuum-sealed and includes a balanced metal pattern to prevent degradation of the performance of the accelerometer. A dicing process is performed on the accelerometer to isolate the electrical leads of the accelerometer. The accelerometer further includes overshock protection bumpers and patterned metal electrodes to reduce stiction during the operation of the accelerometer.