Method for fabricating a trench capacitor with an insulation collar

A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.

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Bibliographic Details
Main Authors Heineck, Lars, Kudelka, Stephan, Lützen, Jörn, Moll, Hans-Peter, Popp, Martin, Schlösser, Till, Steinmetz, Johann
Format Patent
LanguageEnglish
Published 12.07.2005
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Summary:A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.