Micromechanical component

A micromechanical component includes a substrate and a cover layer deposited on the substrate, underneath the cover layer, a region of porous material being provided which mechanically supports and thermally insulates the cover layer. On the cover layer, a heating device is provided to heat the cove...

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Bibliographic Details
Main Authors Benzel, Hubert, Weber, Heribert, Bauer, Michael, Artmann, Hans, Pannek, Thorsten, Schaefer, Frank, Krummel, Christian
Format Patent
LanguageEnglish
Published 14.06.2005
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Summary:A micromechanical component includes a substrate and a cover layer deposited on the substrate, underneath the cover layer, a region of porous material being provided which mechanically supports and thermally insulates the cover layer. On the cover layer, a heating device is provided to heat the cover layer above the region; and above the region, a detector is provided to measure an electric property of a heated medium provided above the region on the cover layer.