Method and geometry for reducing drift in electrostatically actuated devices
A method and geometry for reducing drift in an electrostatically actuated device, the electrostatically actuated device including a dielectric material, for insulating conducting sections from a ground, the conducting sections being used to generate an electric field for controlling thereby the elec...
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| Format | Patent |
| Language | English |
| Published |
03.05.2005
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| Online Access | Get full text |
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| Summary: | A method and geometry for reducing drift in an electrostatically actuated device, the electrostatically actuated device including a dielectric material, for insulating conducting sections from a ground, the conducting sections being used to generate an electric field for controlling thereby the electrostatically actuated device includes, configuring a geometry of the dielectric material such that the electric field applied to exposed dielectric material comprises a substantially homogeneous electric field. |
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