Transfer of optical element patterns on a same side of a substrate already having a feature thereon

A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provide...

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Bibliographic Details
Main Authors Suleski, Thomas J, Boye, Robert Russell, Delaney, William, Miller, Harris, Morris, James, Han, Hongtao, Mathews, Jay
Format Patent
LanguageEnglish
Published 22.03.2005
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Summary:A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.