Thin film transistor array panel for a liquid crystal display

In liquid crystal display device having a multi-layer conductive layer, such conductive layer is formed using a photoresist pattern having different thicknesses depending on the position. Upper layer of the gate pad is removed using an etch mask of the photoresist pattern of different thickness. A g...

Full description

Saved in:
Bibliographic Details
Main Authors Baek, Bum-Ki, Hong, Mun-Pyo, Kim, Jang-Soo, Huh, Sung-Wook, Yoon, Jong-Soo, Kim, Dong-Gyu
Format Patent
LanguageEnglish
Published 01.02.2005
Online AccessGet full text

Cover

More Information
Summary:In liquid crystal display device having a multi-layer conductive layer, such conductive layer is formed using a photoresist pattern having different thicknesses depending on the position. Upper layer of the gate pad is removed using an etch mask of the photoresist pattern of different thickness. A gate insulating layer, a semiconductor layer, and an ohmic contact layer are sequentially formed. A conductive material is deposited and patterned to form a data wire. Finally passivation layer is formed and an indium tin oxide layer is deposited and patterned to form a pixel electrode, a redundant gate pad, and a redundant data pad.