Method for producing silicon nitride filter

A method for producing a silicon nitride filter including heat-treating in nitrogen a green body containing from 40 to 90% of metal silicon particles having an average particle diameter of from 1 to 200 μm and from 10 to 60% of a pore-forming agent, where the total amount of the metal silicon partic...

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Bibliographic Details
Main Authors Miyakawa, Naomichi, Shinohara, Nobuhiro, Arai, Kanji, Takahashi, Hideo
Format Patent
LanguageEnglish
Published 01.02.2005
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Summary:A method for producing a silicon nitride filter including heat-treating in nitrogen a green body containing from 40 to 90% of metal silicon particles having an average particle diameter of from 1 to 200 μm and from 10 to 60% of a pore-forming agent, where the total amount of the metal silicon particles and the pore-forming agent is at least 90%, forms a porous product made substantially of silicon nitride.