Thin film lithium niobate and method of producing the same

Metal oxide films such as lithium niobate are formed in an amorphous state on a substrate such as lithium niobate and can be readily etched by conventional liquid or dry etchants. The amorphous film may then be converted by annealing to a crystalline form well suited to formation of electro-optical...

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Bibliographic Details
Main Authors McCaughan, Leon, Kuech, Thomas F, Saulys, Dovas A, Joshkin, Vladimir A, Chowdhury, Aref
Format Patent
LanguageEnglish
Published 25.01.2005
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Summary:Metal oxide films such as lithium niobate are formed in an amorphous state on a substrate such as lithium niobate and can be readily etched by conventional liquid or dry etchants. The amorphous film may then be converted by annealing to a crystalline form well suited to formation of electro-optical devices.