Electrostatic discharge protection for eletrostatically actuated microrelays

• Main Authors: McGruer, Nicol E, Zavracky, Paul M
• Format: Patent
• Language: English
• Published: 28.12.2004

N/A Apparatus and methods for protecting devices such as micro-switches () and micro-relays from adverse effects of electrostatic discharge (ESD). A protection device is provided that includes a two terminal switch () that can be actuated by an ESD event to protect an EDS-sensitive micro-switch or micro-relay from potential malfunction and/or damage. The two terminal switch is configured to close in less time than the micro-switch or micro-relay it is protecting, thereby disipating the energy associated with the ESD event without causing damage to the micro-relays which are provided with increased immunity to the adverse effects of ESD events. The micro-switch includes respective drain/gate terminal pairs at respective ends of the device. The micro-relay includes at least two drain terminals () and a gate terminal () at respective ends of the device. The micro-switch and micro-relay are configured to be less sensitive to ESD events by using the gate terminal () at one end of the device to latch that end of the device down, thereby increasing the gate or drain voltage required to generate a threshold electric field to pull the other end of the device down.