Micro-electromechanical inductive switch

This invention is generally related to micro-electro mechanical systems (MEMS) especially MEMS switches, and more specifically, to an inductive MEMS switch utilizing inductive coupling and decoupling, and which is fully compatible with standard CMOS manufacturing materials and processes. A micro-ele...

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Bibliographic Details
Main Authors Volant, Richard P, Florkey, John E, Groves, Robert A
Format Patent
LanguageEnglish
Published 14.12.2004
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Summary:This invention is generally related to micro-electro mechanical systems (MEMS) especially MEMS switches, and more specifically, to an inductive MEMS switch utilizing inductive coupling and decoupling, and which is fully compatible with standard CMOS manufacturing materials and processes. A micro-electro mechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a movable platform and a second plurality of coils on a stationary platform or substrate, the coils on the movable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the movable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the movable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.