Ultraviolet and vacuum ultraviolet transparent polymer compositions and their uses

This invention concerns partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 140 nanometer to 186 nanometers. Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transp...

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Bibliographic Details
Main Authors Wheland, Robert Clayton, French, Roger Harquail, Zumsteg, Jr., Fredrick Claus
Format Patent
LanguageEnglish
Published 30.11.2004
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Summary:This invention concerns partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 140 nanometer to 186 nanometers. Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from 140 to 186 nanometers.