Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses

1. Field of the Invention A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted...

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Bibliographic Details
Main Authors Bisschops, Theodorus H. J, Vijfvinkel, Jakob, Soemers, Hermanus M. J. R, Driessen, Johannes C, Renkens, Michael J. M, Bouwer, Adrianus G
Format Patent
LanguageEnglish
Published 09.11.2004
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Summary:1. Field of the Invention A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.