Microelectromechanical system (MEMS) with improved beam suspension

The present invention relates to microelectromechanical systems (MEMS) and in particular to MEMS devices employing beams supported for movement on flexible transverse arms. In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication p...

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Bibliographic Details
Main Authors Herbert, Patrick C, Annis, Jeffrey R, Yao, Jun J, Morris, Winfred L, Larsson, Henric, Harris, Richard D, Kretschmann, Robert J
Format Patent
LanguageEnglish
Published 12.10.2004
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Summary:The present invention relates to microelectromechanical systems (MEMS) and in particular to MEMS devices employing beams supported for movement on flexible transverse arms. In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.