Optically controlled MEM switches

The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate. An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switch...

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Main Authors Hsu, Tsung-Yuan, Loo, Robert Y, Tangonan, Greg, Lam, Juan F
Format Patent
LanguageEnglish
Published 12.10.2004
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Abstract The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate. An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
AbstractList The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate. An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
Author Lam, Juan F
Hsu, Tsung-Yuan
Loo, Robert Y
Tangonan, Greg
Author_xml – sequence: 1
  fullname: Hsu, Tsung-Yuan
– sequence: 2
  fullname: Loo, Robert Y
– sequence: 3
  fullname: Tangonan, Greg
– sequence: 4
  fullname: Lam, Juan F
BookMark eNrjYmDJy89L5WRQ9C8oyUxOzMmpVEjOzyspys_JSU1R8HX1VSguzyxJzkgt5mFgTUvMKU7lhdLcDApuriHOHrqlxQWJJal5JcXx6UWJIMrAzMLA2NTU0pgIJQA98ihM
ContentType Patent
CorporateAuthor HRL Laboratories, LLC
CorporateAuthor_xml – name: HRL Laboratories, LLC
DBID EFH
DatabaseName USPTO Issued Patents
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EFH
  name: USPTO Issued Patents
  url: http://www.uspto.gov/patft/index.html
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 06803559
GroupedDBID EFH
ID FETCH-uspatents_grants_068035593
IEDL.DBID EFH
IngestDate Sun Mar 05 22:30:42 EST 2023
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-uspatents_grants_068035593
OpenAccessLink https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6803559
ParticipantIDs uspatents_grants_06803559
PatentNumber 6803559
PublicationCentury 2000
PublicationDate 20041012
PublicationDateYYYYMMDD 2004-10-12
PublicationDate_xml – month: 10
  year: 2004
  text: 20041012
  day: 12
PublicationDecade 2000
PublicationYear 2004
References Lam et al. (5541614) 19960700
Graf (4160141) 19790700
Larson (5121089) 19920600
Hsu et al. (6310339) 20011000
Larson, Lawrence, et al, "Microactuators for GaAs-based Microwave Integrated Circuits," IEEE, pp. 743-746 (1991). month unknown.
Nathanson et al. (4922253) 19900500
Horino et al. (6219472) 20010400
(0 484 142) 19920500
Aksyuk et al. (6075239) 20000600
References_xml – year: 19920600
  ident: 5121089
  contributor:
    fullname: Larson
– year: 20000600
  ident: 6075239
  contributor:
    fullname: Aksyuk et al.
– year: 19920500
  ident: 0 484 142
– year: 19900500
  ident: 4922253
  contributor:
    fullname: Nathanson et al.
– year: 19960700
  ident: 5541614
  contributor:
    fullname: Lam et al.
– year: 20011000
  ident: 6310339
  contributor:
    fullname: Hsu et al.
– year: 19790700
  ident: 4160141
  contributor:
    fullname: Graf
– year: 20010400
  ident: 6219472
  contributor:
    fullname: Horino et al.
Score 2.609413
Snippet The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate. An optically controlled...
SourceID uspatents
SourceType Open Access Repository
Title Optically controlled MEM switches
URI https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6803559
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfVxdS8MwFL1sQ1CfFBXnFxF8jQabdemztBShugeFvY0kzRWhdmXpGP57b9oxfNHXBE6-c-4NJwfgzljiIGeQR4mVXMppzA3tDC6tRmtQT6UOiWLxEufv8nk-mQ8g3_2F-aJjxBvqi79f-6ZdduJKut77hee9-XPwCKyD-8Cmrpa6nJX4ECtB1JkMYahEkPalWX4I-wRBIVvd-l-kkR3B3qwrPYaBq0_g9rXp3o2rb7bVh1euZEVaML_5DHPnT4Fl6dtTznd4i49V0KksxLbd6AxGlK-7c2DWKhvpCarHCKXQylgULkEXnFUonsExjP-Eufin7hIOepfBIKe4glG7WrtrYsTW3HTD_QEdSmxY
link.rule.ids 230,309,783,805,888,64375
linkProvider USPTO
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfVzPS8MwFH7MKepOiorzx4zgNVps1rVnbemmnT0o7FaSNBGh68rSMfzvfWnH8KLXBF5-vCTfe8mXD-BOSMQgJTR1A8koYyOPClwZlEmupdB8xLhNFJOpF3-wyWw460C8_Qszx21EK-yLuV-Zql405Eo83lvH01b82WoEllZ9YF0WC56nuX7wfAehM9iBXfsUZcl9YRT34ACNYNBW1uYXbERHsJc2pcfQUeUJ3L5Vzc1x8U02DPFC5SQJE2LWX3b2zCmQKHx_iunWXva5tEyVzNm07J5BFzN2dQ5ESl-6fKj9R1czh_tCakcFWlltFYxodB_6f5q5-KfuBvbT5yh7HU9fLuGwlRy03Ior6NbLlbpGeKzFoBn5D51ob1Q
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Optically+controlled+MEM+switches&rft.inventor=Hsu%2C+Tsung-Yuan&rft.inventor=Loo%2C+Robert+Y&rft.inventor=Tangonan%2C+Greg&rft.inventor=Lam%2C+Juan+F&rft.number=6803559&rft.date=2004-10-12&rft.externalDBID=n%2Fa&rft.externalDocID=06803559