Optically controlled MEM switches
The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate. An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switch...
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| Main Authors | , , , |
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| Format | Patent |
| Language | English |
| Published |
12.10.2004
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| Online Access | Get full text |
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| Summary: | The present invention pertains to microfabricated electromechanical (MEM) switches which may be fabricated on a substrate.
An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control. |
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