Low dielectric constant organic dielectrics based on cage-like structures
The field of the invention is low dielectric constant materials. A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslink...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
28.09.2004
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Online Access | Get full text |
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Summary: | The field of the invention is low dielectric constant materials.
A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone. |
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