Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
The present invention is directed to the manufacture of nitrogen trifluoride (NF ) In particular, the present invention is directed to a process for the reduction or elimination of liquid NH /HF byproduct during the manufacture of NF . A process for reducing or eliminating NH/HF/MFz liquid waste mel...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
14.09.2004
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Online Access | Get full text |
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Summary: | The present invention is directed to the manufacture of nitrogen trifluoride (NF
) In particular, the present invention is directed to a process for the reduction or elimination of liquid NH
/HF byproduct during the manufacture of NF
.
A process for reducing or eliminating NH/HF/MFz liquid waste melt in the manufacture of NFis provided which includes the steps of providing an NFreactor for a reaction of Fwith a liquid NH/HF/MFz mixture that produces NF, HF, Nand other nitrogen fluorides as gaseous products and a liquid NH/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH/HF/MFz waste melt produced by the reactor. |
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