Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride

The present invention is directed to the manufacture of nitrogen trifluoride (NF ) In particular, the present invention is directed to a process for the reduction or elimination of liquid NH /HF byproduct during the manufacture of NF . A process for reducing or eliminating NH/HF/MFz liquid waste mel...

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Bibliographic Details
Main Authors Tsirukis, Athanasios, Lileck, John Theodore, Withers, Jr., Howard Paul, Fegley, Kenneth E
Format Patent
LanguageEnglish
Published 14.09.2004
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Summary:The present invention is directed to the manufacture of nitrogen trifluoride (NF ) In particular, the present invention is directed to a process for the reduction or elimination of liquid NH /HF byproduct during the manufacture of NF . A process for reducing or eliminating NH/HF/MFz liquid waste melt in the manufacture of NFis provided which includes the steps of providing an NFreactor for a reaction of Fwith a liquid NH/HF/MFz mixture that produces NF, HF, Nand other nitrogen fluorides as gaseous products and a liquid NH/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH/HF/MFz waste melt produced by the reactor.