Method and apparatus for tool and tip design for nanomachining and measurement

• Main Authors: Kley, Victor B, LoBianco, Robert T
• Format: Patent
• Language: English
• Published: 07.09.2004

This invention is related generally to the field of Atomic Force Microscopy (AFM), Scanning Tunneling Microscopy (STM), Near field Scanning Optical Microscopy (NSOM), NanoSpectroPhotometry (NSP), NanoPolarimetry (NP), Magnetic Field Microscopy (MFM) and any other methods adaptable and suitable to guide scanning and nanomachining techniques. These technologies are sometimes collectively referred to as Scanning Probe Microscopy (SPM). Specifically, the present invention relates generally to micro-objects (structures smaller than 200 microns) and more particularly to micro-objects used as tool tips in a SPM system for making measurements and/or modifications on a target object. A single-body structure is presented for use as a tool tip for making modifications and/or collecting measurements on a target object. The single-body structure comprises a first end portion, a second end portion opposite the first portion, and a mid portion between the first and second end portions, wherein a central axis can be defined extending from the first end portion to the second end portion, and wherein the single-body structure has a maximum linear dimension of approximately 50 microns or less. The single-body structure may be comprised of diamond. One of the first and second end portions may have a larger cross sectional area, in a plane perpendicular to the central axis, than does the other of the first and second end portions. One of the first and second end portions may have a larger cross sectional diameter, in at least one direction perpendicular to the central axis, than does the other of the first and second end portions.