Method and apparatus for generating X-ray or EUV radiation
The present invention generally relates to a method and an apparatus for generating X-ray or extreme ultraviolet (EUV) radiation, especially with high brilliance. The generated radiation can for example be used in medical diagnostics, non-destructive testing, lithography, microscopy, materials scien...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
23.03.2004
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Online Access | Get full text |
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Summary: | The present invention generally relates to a method and an apparatus for generating X-ray or extreme ultraviolet (EUV) radiation, especially with high brilliance. The generated radiation can for example be used in medical diagnostics, non-destructive testing, lithography, microscopy, materials science, or in some other X-ray or EUV application.
In a method and an apparatus for generating X-ray or EUV radiation, an electron beam is brought to interact with a propagating target jet, typically in a vacuum chamber. The target jet is formed by urging a liquid substance under pressure through an outlet opening. Hard X-ray radiation may be generated by converting the electron-beam energy to Bremsstrahlung and characteristic line emission, essentially without heating the jet to a plasma-forming temperature. Soft X-ray or EUV radiation may be generated by the electron beam heating the jet to a plasma-forming temperature. |
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