Diffraction tomography for monitoring latent image formation
1. Field of the Invention A system and method of reconstructing an image of a structure having periodic variations in index of refraction. Electromagnetic waves are projected onto the structure and the resulting diffracted electromagnetic waves are measured, wherein the step of measuring includes th...
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| Format | Patent |
| Language | English |
| Published |
02.12.2003
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| Online Access | Get full text |
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| Summary: | 1. Field of the Invention
A system and method of reconstructing an image of a structure having periodic variations in index of refraction. Electromagnetic waves are projected onto the structure and the resulting diffracted electromagnetic waves are measured, wherein the step of measuring includes the step of determining a plurality of intensities DE. Refractive terms can then be calculated as a function of the intensities DE. |
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