Fabrication of three dimensional container diode for use with multi-state material in a non-volatile memory cell
1. Field of the Invention A vertically oriented diode for use in delivering current to a multi-state memory element in a memory cell. A vertical diode may be disposed in a diode container extending downwardly from a top of a silicon or oxide layer, and may be formed of a combination of silicon and/o...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
25.11.2003
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Online Access | Get full text |
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Summary: | 1. Field of the Invention
A vertically oriented diode for use in delivering current to a multi-state memory element in a memory cell. A vertical diode may be disposed in a diode container extending downwardly from a top of a silicon or oxide layer, and may be formed of a combination of silicon and/or metal layers disposed proximate to inner surfaces of a diode container. A multi-state memory element may be formed of a multi-state material, such as a chalcogenide, above a diode to complete a memory cell. |
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