Door for wafer container having rotatable cammed member and movable links

• Main Authors: Wu, Tzong-Ming, Huang, Jen-Rong, Liang, Muh-Wang
• Format: Patent
• Language: English
• Published: 23.09.2003

1. Field of the Invention A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable camm...