Door for wafer container having rotatable cammed member and movable links

1. Field of the Invention A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable camm...

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Bibliographic Details
Main Authors Wu, Tzong-Ming, Huang, Jen-Rong, Liang, Muh-Wang
Format Patent
LanguageEnglish
Published 23.09.2003
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Summary:1. Field of the Invention A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable cammed member, and two second links respectively coupled to the first links and horizontally moved in and out of respective second latch holes on the wafer transport module upon movement of the first links. The links each have a slope adapted to be moved with the respective link over a respective bearing means of the door body to force the door body inwards against the wafer transport module, keeping the wafer transport module well sealed.