Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
1. Field of the Invention A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
05.08.2003
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Online Access | Get full text |
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Summary: | 1. Field of the Invention
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing. |
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