Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses

1. Field of the Invention A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber...

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Bibliographic Details
Main Authors Bisschops, Theodorus H. J, Vijfvinkel, Jakob, Soemers, Hermanus M. J. R, Driessen, Johannes C, Renkens, Michael J. M, Bouwer, Adrianus G
Format Patent
LanguageEnglish
Published 05.08.2003
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Summary:1. Field of the Invention A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.