Method of manufacturing sensor having membrane structure

1. Field of the Invention A sensor for measuring a physical amount such as an amount of air includes a membrane structure composed of metal stripes sandwiched between first and second insulating layers. A metal layer made of platinum or the like is formed on the first insulating layer and then heat-...

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Bibliographic Details
Main Authors Wado, Hiroyuki, Sugiura, Makiko, Yamamoto, Toshimasa, Takeuchi, Yukihiro, Kohno, Yasushi
Format Patent
LanguageEnglish
Published 05.08.2003
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Summary:1. Field of the Invention A sensor for measuring a physical amount such as an amount of air includes a membrane structure composed of metal stripes sandwiched between first and second insulating layers. A metal layer made of platinum or the like is formed on the first insulating layer and then heat-treated to improve its properties. Then, the metal layer is etched into a form of the metal stripes. The second insulating layer made of a material such as silicon dioxide is formed on the etched metal stripes. Since the metal layer is heat-treated before it is etched into the form of metal stripes, the metal stripes are not deformed by the heat-treatment. The second insulating layer can be formed on the metal stripes without generating cracks in the second insulating layer.