Multi-stage drive arrangements and their application in lithographic projection apparatuses

1. Field of the Invention A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in...

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Bibliographic Details
Main Authors Renkens, Michael J. M, Bouwer, Adrianus G, Driessen, Johannes C, Bisschops, Theodorus H. J, Soemers, Hermanus M. J. R, Vijfvinkel, Jakob
Format Patent
LanguageEnglish
Published 22.07.2003
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Summary:1. Field of the Invention A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.