Method for manufacturing substrate for inspecting semiconductor device

• Main Authors: Kanamaru, Masatoshi, Hosogane, Atsushi, Endou, Yoshihige, Kouno, Ryuji, Miura, Hideo, Tanaka, Shinji, Ohta, Hiroyuki, Ariga, Akihiko, Ban, Naoto, Aoki, Hideyuki
• Format: Patent
• Language: English
• Published: 20.05.2003

The present invention relates to a testing device for a semiconductor element or a semiconductor device. More particularly, the invention relates to a method for manufacturing a substrate used to inspect the semiconductor element, which substrate constitutes the inspecting device, in order to realiz...