Light source

1. Field of the Invention Light source device which can be used as a replacement light source for an ArI excimer laser. The light emitted from a Nd:YAG laser light source (L) is incident on a nonlinear optical crystal (C) and produces a second harmonic which is transmitted to a titanium-sapphire las...

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Bibliographic Details
Main Authors Takaoka, Eiko, Horiguchi, Masahiro, Deki, Kyoichi
Format Patent
LanguageEnglish
Published 05.11.2002
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Summary:1. Field of the Invention Light source device which can be used as a replacement light source for an ArI excimer laser. The light emitted from a Nd:YAG laser light source (L) is incident on a nonlinear optical crystal (C) and produces a second harmonic which is transmitted to a titanium-sapphire laser light source (L). The light emitted by the titanium-sapphire laser light source (L) is incident on nonlinear optical crystals (C, C) by which coherent light (W) as the third harmonic is obtained. Light with a summed frequency of 193 nm is obtained by the means for producing a summed frequency (C). Furthermore, by vector-phase matching the decrease of the conversion efficiency due to heat-induced phase-mismatch can be reduced. In addition, instead of the Nd:YAG laser light source a laser light source such as Nd:YLF, Nd:YVOor the like and instead of the titanium-sapphire laser light source (L) a photoparametric oscillator can be used.