Method for producing trenches for DRAM cell configurations
The invention relates to a method for producing trenches for manufacturing storage capacitors in DRAM cell configurations. The invention relates to a method for producing trenches for manufacturing storage capacitors in DRAM cell configurations. In the method, a two-stage hard mask having a first ma...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
05.11.2002
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Online Access | Get full text |
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