Silicon oxide particles
The invention relates to abrasive compositions useful for surface polishing, especially mechanochemical polishing, and methods for producing abrasive particles. A method for the production of silicon oxide particles includes the pyrolysis of a molecular stream with a silicon compound precursor, an o...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
29.10.2002
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| Online Access | Get full text |
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| Summary: | The invention relates to abrasive compositions useful for surface polishing, especially mechanochemical polishing, and methods for producing abrasive particles.
A method for the production of silicon oxide particles includes the pyrolysis of a molecular stream with a silicon compound precursor, an oxygen source and a radiation absorbing gas. The pyrolysis is driven by a light beam such as an infrared laser beam. The method can be used in the production of nanoscale particles including highly uniform nanoscale particles. |
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