Method of manufacturing a polishing pad using a beam
The present invention is directed, in general, to polishing pads and, more specifically, to a method of manufacturing a polishing pad using a focused beam. The present invention provides a method of manufacturing a polishing pad using a beam, and a system incorporating the method. In one embodiment,...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
08.10.2002
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| Online Access | Get full text |
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| Summary: | The present invention is directed, in general, to polishing pads and, more specifically, to a method of manufacturing a polishing pad using a focused beam.
The present invention provides a method of manufacturing a polishing pad using a beam, and a system incorporating the method. In one embodiment, the method includes providing a cake that is susceptible to beam ablation, and skiving a polishing pad from the cake using a beam apparatus configured to produce a beam. |
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