Polishing composition
1. Field of the Invention A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
24.09.2002
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| Online Access | Get full text |
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| Summary: | 1. Field of the Invention
A polishing composition comprising silica particles, water, and Fe salt and/or Al salt of a polyaminocarboxylic acid; a polishing process comprising applying the polishing composition; a process for manufacturing a magnetic disk substrate, comprising the step of polishing a substrate with the polishing composition; a magnetic disk substrate manufactured by applying the polishing composition. |
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