Pixel thin film transistor and a driver circuit for driving the pixel thin film transistor

• Main Authors: Miyazaki, Minoru, Murakami, Akane, Cui, Baochun, Yamamoto, Mutsuo
• Format: Patent
• Language: English
• Published: 10.09.2002

The present invention relates to an electronic circuit which is formed on an insulating substrate and has a thin semiconductor layer of silicon, for example, forming thin-film transistors, the thin semiconductor layer being required to be connected with conductive interconnects. An electronic circuit formed on an insulating substrate and having thin-film transistors (TFTs) comprising semiconductor layers. The thickness of the semiconductor layers is less than 1500 , e.g., between 100 and 750 . A first layer consisting mainly of titanium and nitrogen is formed on the semiconductor layer. A second layer consisting aluminum is formed on top of the first layer. The first and second layers are patterned into conductive interconnects. The bottom surface of the second layer is substantially totally in intimate contact with the first layer. The interconnects have good contacts with the semiconductor layer.