Micromachined two dimensional array of piezoelectrically actuated flextensional transducers

This invention relates generally to piezoelectrically actuated flextensional transducer arrays and method of manufacture, and more particularly to such transducer arrays which can be used as ultrasonic transducers, fluid drop ejectors and in scanning force microscopes. A transducer suitable for ultr...

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Bibliographic Details
Main Authors Perçin, Gökhan, Khuri-Yakub, Butrus Thomas
Format Patent
LanguageEnglish
Published 03.09.2002
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Summary:This invention relates generally to piezoelectrically actuated flextensional transducer arrays and method of manufacture, and more particularly to such transducer arrays which can be used as ultrasonic transducers, fluid drop ejectors and in scanning force microscopes. A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped membrane.