System and method for purifying and distributing chemical gases

1. Field of the Invention Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in...

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Bibliographic Details
Main Authors Xu, Mindi, Udischas, Richard, Schnepper, Carol, Paganessi, Joseph
Format Patent
LanguageEnglish
Published 28.05.2002
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Summary:1. Field of the Invention Provided is a novel system for vaporizing and purifying a gas to produce ultrapure chemical gases employed at a semiconductor processing facility. The system includes a liquified gas source, a vaporization purification bed, and a buffer tank. The liquefied gas source is in communication with the vaporization purification bed to provide a liquefied gas to the bed with an ultra-pure chemical gas generated in the purification bed. The purified gas is subsequently routed to a buffer tank and to a point of use therefrom.