Method for fabricating a dual damascene structure using a single photoresist layer
A photo-sensitive material layer is formed over a semiconductor substrate. The photo-sensitive material layer is exposed to a first radiation having a maximum intensity at a first wavelength to form a first latent pattern in the photo-sensitive material layer. The photo-sensitive material layer is t...
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| Format | Patent |
| Language | English |
| Published |
16.09.2004
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| Online Access | Get full text |
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| Summary: | A photo-sensitive material layer is formed over a semiconductor substrate. The photo-sensitive material layer is exposed to a first radiation having a maximum intensity at a first wavelength to form a first latent pattern in the photo-sensitive material layer. The photo-sensitive material layer is then exposed to a second radiation having a maximum intensity at a second wavelength to form a second latent pattern in the photo-sensitive material layer. The first latent pattern and the second latent pattern in the photo-sensitive material layer are then simultaneously removed. |
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