Method of making a haze free PZT film

An embodiment of the invention is a method of fabricating a haze free, phase pure, PZT film, 3 , where a vacuum, an inert gas, or a mixture of an inert and oxidizer gas is used in the preheat step, 208 , prior to the deposition, 210 , of the PZT film, 3.

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Bibliographic Details
Main Authors Aggarwal, Sanjeev, Taylor, Kelly, Thomas, Angelica
Format Patent
LanguageEnglish
Published 05.08.2004
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Summary:An embodiment of the invention is a method of fabricating a haze free, phase pure, PZT film, 3 , where a vacuum, an inert gas, or a mixture of an inert and oxidizer gas is used in the preheat step, 208 , prior to the deposition, 210 , of the PZT film, 3.