Coil and coil support for generating a plasma

A coil has an integral fastener portion to facilitate fastening the coil to a shield wall to reduce generation of particulates.

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Bibliographic Details
Main Authors Pancham, Ian, Rosenstein, Michael, DeLaurentis, Leif, Lau, Allen, Gopalraja, Praburam, Van Gogh, James
Format Patent
LanguageEnglish
Published 24.06.2004
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Summary:A coil has an integral fastener portion to facilitate fastening the coil to a shield wall to reduce generation of particulates.