Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
The present publication discloses a capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor comprises at least one fixed electrode ( 3 ), and at least one movable electrode ( 6, 7 ) electrically isolated from sai...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
05.02.2004
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| Online Access | Get full text |
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| Summary: | The present publication discloses a capacitive pressure sensor structure, in particular for measurement of absolute pressure, and a method for manufacturing the sensor. The sensor comprises at least one fixed electrode (
3
), and at least one movable electrode (
6, 7
) electrically isolated from said fixed electrode (
3
) and spaced apart (
10
) from said fixed electrode (
3
). According to the invention, a portion of said movable electrode (
6, 7
) is formed from a porous polycrystalline silicon layer (
6
) that in a finished component remains as an integral portion of said flexibly movable electrode (
6, 7
). |
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