Apparatus for applying ionized particles and method for applying ionized particles

An apparatus for applying ionized particles is disclosed. The apparatus includes an ionized particle emitter for emitting ionized particles against an object; and an electric potential maintainer for maintaining electric potential of the object at a predetermined level such that the ionized particle...

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Bibliographic Details
Main Author Saida, Itaru
Format Patent
LanguageEnglish
Published 20.02.2003
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Summary:An apparatus for applying ionized particles is disclosed. The apparatus includes an ionized particle emitter for emitting ionized particles against an object; and an electric potential maintainer for maintaining electric potential of the object at a predetermined level such that the ionized particles emitted against the object by the ionized particle emitter are continuously attracted to the object while the electric potential is maintained. A method for applying ionized particles is also disclosed. The method includes emitting ionized particles against an object, and maintaining electric potential of the object at a predetermined level such that the ionized particles are continuously attracted to the object.