Method and measuring arrangement for detecting an object
The present invention relates to a method and a measurement apparatus for detection of a specimen ( 1 ), a specimen ( 1 ) being illuminated with a light source ( 2 ) and imaged with the aid of an imaging optical system ( 3 ) onto a detector ( 4 ) preferably embodied as a CCD camera, and the specimen...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
16.01.2003
|
| Online Access | Get full text |
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| Summary: | The present invention relates to a method and a measurement apparatus for detection of a specimen (
1
), a specimen (
1
) being illuminated with a light source (
2
) and imaged with the aid of an imaging optical system (
3
) onto a detector (
4
) preferably embodied as a CCD camera, and the specimen (
1
) being detected repeatedly with the detector (
4
). With the method and the measurement apparatus according to the present invention, fluctuations in the statistical analysis of detected signals or data can be minimized, the detected signals or data being subject to detection-related error sources. The method and the measurement apparatus according to the present invention are characterized in that the detection time of the detector (
4
) for the individual detections and/or the intensity of the light serving for specimen illumination are varied. |
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