Method of connecting a multiplicity of optical elements to a basic body
In a method of connecting a multiplicity of optical elements ( 9 ) to a basic body ( 8 ), in particular for producing a faceted mirror ( 1 ), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements ( 9 ) are positioned on the basic body ( 8, 14 ) and...
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| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
21.02.2002
|
| Online Access | Get full text |
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| Summary: | In a method of connecting a multiplicity of optical elements (
9
) to a basic body (
8
), in particular for producing a faceted mirror (
1
), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements (
9
) are positioned on the basic body (
8, 14
) and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure (
11
) and the optical elements (
9
) are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure (
14
) as the basic body. |
|---|